High Voltage Power Supplies for Electrostatic Chuck EJC Series

EJC Series

Electrostatic chuck

output voltage:0 to ±5kV
output power:0 to 30W
output current:0 to 30mA
Fast response
High reliability and long life

High Voltage Power Supplies for Electrostatic Chuck ECU Series

ECU Series

Electrostatic chuck

output voltage:0 to ±5kV
output power:0 to 10W
output current:0 to 10mA
Output reversible and forced discharge
Local, Remote or RS-232C

High Voltage Power Supplies for Electrostatic Chuck ECUB Series

ECUB Series

Electrostatic chuck

output voltage:0 to ±6kV
output power:0 to 2.5W
output current:0 to 2.5mA
+ and -, 2 ch Unit Reversible type

High Voltage Power Supplies for Electrostatic Chuck EC Series

EC Series

2ch output / Rack mount

output voltage:0 to ±10kV
output power:0 to 200W
output current:0 to 200mA
Compact and high power
Reversible output
Specially designed for
Electrostatic Chuck applications

High Voltage Power Supplies for Electrostatic Chuck ECA Series

ECA Series

Electrostatic chuck

output voltage:0 to ±10kV
output power:0 to 30W
output current:0 to 30mA
Fast response
High reliability and long life

High Voltage Power Supplies for Electrostatic Chuck ECG Series

ECG Series

Electrostatic chuck

output voltage:0 to ±1kV
output power:0 to 10W
output current:0 to 10mA
Single Output, Rack-mount
Reversible type

High Voltage Power Supplies for Electrostatic Chuck MEC Series

MEC Series

output voltage:0 to ±10kV
output power:0 to 10W
output current:0 to 10mA

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