Specialized High Voltage power supply for Scanning Electron Microscope
- Max output voltage for accelerating: -15kV or -30kV
- Max output voltage for biasing: +3.5kV
- Max output power for filament: 15W
- High reliability design and elaborated protections
The exclusive design for bringing out the performance of an electron gun to the maximum!
SEM series is a high voltage power supply for electron gun of Scanning Electron Microscope (SEM), and a floating power supply with integrated acceleration voltage, bias voltage, and filament.
Features and Benefits
- Three outputs for electron beam of SEM in one case
- 5 ppm high stability, low ripple noise
- Overcurrent protection
- Short circuit protection
Models
| Model | Accelerating power supply | ||||||
|---|---|---|---|---|---|---|---|
| Output Voltage | Output Current/power | Output setting accuracy | Stability (after warm-up of 1Hr) |
Ripple | Control Voltage | Output Current monitor |
|
| SEM-15 | 0 V to -15 kV | 300 µA * | ±3% | ±5 ppm/3 minutes | 10 ppm p-p F.S. | 0 V to 10 V (CV) | 3 V/300 µA *1 |
| SEM-30 | 0 V to -30 kV | 300 µA * | ±3% | ±5 ppm/3 minutes | 10 ppm p-p F.S. | 0 V to 10 V (CV) | 3 V/300 µA *1 |
- * Including feedback current.
Options
-LB6: Changing the bias voltage to "0 V to +6 kV"
-LS03: Adding the power supply for suppressor
(With this option, the dimension of SEM-15 and SEM-30 is 11.02" wide x 9.84" deep x 4.92" high.)
-LFcv: Constant voltage filament output
-LFcc: Constant current filament output
For specifications, see the table below. -LFcv and -LFcc cannot be chosen together.
| Model | Control of filament output | Filament output | Control Volt. | Caution |
|---|---|---|---|---|
| Standard | CP (Constant Power) | 0 W to 15 W (Load1 Ω) | 0 Vdc to 10 Vdc | MAX. output volt.: 5 V |
| -LFcv optional | CV (Constant Voltage) | 0 V to 5 V (Load1 Ω) | 0 Vdc to 10 Vdc | MAX. output power: 15 W |
| -LFcc optional | CC (Constant Current) | 0 A to 5 A (Load1 Ω) | 0 Vdc to 10 Vdc | MAX. output power: 15 W |
Accessory
Output Cable *: Output cable with plug (flying lead) 1.5m
Model: CN-SEM4P
* The model number of output cable and output connector will change when -LB6 or -LS03 option is chosen. Please contact our sales office for details.
Download
-
SEM series Datasheet
Date: 2021-09-08 rev. 09
PDF (3,450 KB)
-
Safety and Usage of High voltage Power supply
Date: 2020-10-09 rev. 02
PDF (1,366 KB)
The account registration is necessary for downloading
-
SEM series Datasheet
Date: 2021-09-08 rev. 09
PDF (3,450 KB)
-
Safety and Usage of High voltage Power supply
Date: 2020-10-09 rev. 02
PDF (1,366 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.