ION BEAM POWER SUPPLY
Multi-output high voltage power supply for ion beam, ion gun
- +10 to +60 kV Accelerator Voltage
- Selectable each floating channel output
- Voltage range: 60 kV
- Current: 5 A
FEATURES AND BENEFITS
- Designed for FIB, integrated high voltage power supply with multiple outputs of ion gun in the accelerator, filament, suppressor, extractor, and lens
- Selectable the best electrode power supply for your ion gun
- Ultra Low Ripple and High stability
- Low temperature coefficient. (25 ppm/°C and 10 ppm/°C is optionally available)
- Floating level: 4 channels programmable power supply with voltage monitor and current monitor for each channel
- Ground level: 1 channel programmable Accelerator power supply with voltage monitor and current monitor
- Controllable via RS-232C, RS-485, GPIB and USB.
- Maximum acceleration voltage 100kV available on request
- Additional ground-referenced voltage channels on request
- Other options available than listed below
APPLICATIONS
- Focused Ion Beam (FIB)
- Particle accelerator
- Ion implantation equipmet
- Ion gun
Models
Model | Ch.Name | Reference level | Output | |
---|---|---|---|---|
Voltage | Current | |||
HIB series | Filament | Accelerator | +2 V, +5 V, +6 V, +8 V | 3 A, 5 A |
Suppressor | Accelerator | -300 V, -600 V, -1 kV, -2 kV | 50 µA, 100 µA | |
Extractor | Accelerator | -10 kV, -12 kV, -15 kV | 500 µA | |
Lens1 | Accelerator | +15 kV, +10 kV, +5 kV, -5 kV, -10 kV, -15 kV | 50 µA | |
Accelerator | Ground | +10 kV, +15kV, +30 kV, +40kV, +50 kV, +60 kV | 100 µA, 250 µA, 300 µA, 500 µA, 700 µA, 750 µA | |
Lens2 | Ground | -30 kV, +30 kV | 50 µA | |
Lens3 | Ground | -30 kV, +30 kV | 50 µA |
Select voltage according to youre ion beam.
Specifications
Options
- -LFC
- Filament (ch1) center common
Dimensions
Download
-
HIB series Datasheet
Date: 2022-07-14 rev. 04
PDF (1,260 KB)
-
Safety and Usage of High voltage Power supply
Date: 2020-10-09 rev. 02
PDF (1,366 KB)
The account registration is necessary for downloading
-
HIB series Datasheet
Date: 2022-07-14 rev. 04
PDF (1,260 KB)
-
Safety and Usage of High voltage Power supply
Date: 2020-10-09 rev. 02
PDF (1,366 KB)
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