Rack Mount High Voltage Power Supplies HIB series

  • HIB series
  • HIB series

HIB series

Ion Beam power supply

  • +10 kV to +60 kV Acceralator Voltage

Multi-output high voltage power supply for ion beam

Features and Benefits

  • Ultra Low Ripple and High stability
  • Low temperature coefficient. (25 ppm/°C and 10 ppm/°C is optionally available)
  • Floating level: 4 ch PS programmable with Vmon and Imon for each channel
  • Ground level: 1 ch PS programmable with Vmon and Imon
  • Custom configuration with additional output is available.
  • Controllable via RS-232C, 485, 422, GPIB and USB.
  • Various models up to 100 kV are available.

Applications

  • FIB (Focused Ion Beam)
  • Ion implantation
  • Ion gun

Models

Model Ch.Name Reference level Output
Voltage Current
HIB series Filament Acceralator + 2 V, + 8 V and so on 3 A, 5 A
Suppressor Acceralator -1 kV, -2 kV and so on 50 µA, 100 µA
Extractor Acceralator -10 kV, -12 kV, -15 kV 500 µA
Lens1 Acceralator +5 kV, +15 kV and so on 50 µA
Acceralator Ground +10 kV, +30 kV, +60 kV and so on 100 µA, 700 µA and so on
Lens2 Ground -30 kV, +30 kV 50 µA
Lens3 Ground -30 kV, +30 kV 50 µA

Options

-LFC: Filament (ch1) center common

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