• AES/AESS series | High Voltage power supply Rack mount | Matsusada Precision
  • AES/AESS series | High Voltage power supply Rack mount | Matsusada Precision

High Voltage Power Supply for SEM and Semiconductors with an ultra-low ripple

  • Voltage range: 5 to 30 kV
  • current: 0.5 to 6 mA
  • power: 15 to 30 W

SEM, Semiconductor Inspection System Power Supply

AESS series high voltage power supply offers ultra-high performance featuring ultra-low ripple, low temperature coefficient, and high stability. Using the expert know-how and state-of-the-art technology cultivated over Matsusada's 30 years of history, the AESS series achieved world-class performance. The series is equipped with the voltage and current monitors as standard, and the digital control is available via RS-232C. You can also use it via LAN, USB, and RS-485 with separate adapters.

Features and Benefits

  • Ultra Low Ripple and High stability
  • Low temperature coefficient, 25ppm/°C (Below 10ppm/°C model is available.)
  • With voltage and current monitor
  • Remote control via RS-232C
    Control via LAN, USB, RS-422, RS-485 or GPIB is also available. However, it is different method from the control with Matsusada's digital controller CO/USB series. Please contact our sales representative for detail.

Applications

Models

Model Output
Voltage [kV] Current [mA] Ripple [mVp-p]
AESS-5P3 5 kV 3 mA 10 mVp-p
AESS-5P6 6 mA 10 mVp-p
AESS-10P1.5 10 kV 1.5 mA 20 mVp-p
AESS-10P3 3 mA 20 mVp-p
AESS-15P1 15 kV 1 mA 30 mVp-p
AESS-15P2 2 mA 30 mVp-p
AESS-30P0.5 30 kV 0.5 mA 50 mVp-p
AESS-30P1 1 mA 50 mVp-p
Model Output
Voltage [kV] Current [mA] Ripple [mVp-p]
AESS-5N3 -5 kV 3 mA 10 mVp-p
AESS-5N6 6 mA 10 mVp-p
AESS-10N1.5 -10 kV 1.5 mA 20 mVp-p
AESS-10N3 3 mA 20 mVp-p
AESS-15N1 -15 kV 1 mA 30 mVp-p
AESS-15N2 2 mA 30 mVp-p
AESS-30N0.5 -30 kV 0.5 mA 50 mVp-p
AESS-30N1 1 mA 50 mVp-p

Specifications

For details, download the datasheet below.

Dimensions

For details, download the datasheet below.

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