Electrostatic Chuck power supply
Dual output fast response rack mount
- ±1kV to ±10kV
- 6W,10W,30W
- Single
- 2ch output (Some models)
SINGLE/2CH OUTPUT, RACKMOUNT AND BIPOLAR TYPE ±1 KV TO ±10 KV/5 W, 6 W, 10 W, 30 W
ECA series is a high voltage power supply developed especially for electrostatic chuck application. The wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity. This electrostatic chuck power supply is a convenient power supply suitable for unipolar systems (2ch) or bipolar systems. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.
FEATURES AND BENEFITS
- Specially designed for Electrostatic Chuck (E-Chuck, ESC) application
- 2 output channels
- Bipolar output
- Built-in RF filter is available. (option)
- Fast response(100 ms) with amplifier structure
- Uses no relay, so high reliability and long life
MAIN APPLICATION
Models
| Model | Output | Channel | Input Current [A] (at AC115 V) max |
|
|---|---|---|---|---|
| Voltage [kV] | Current [mA] | |||
| ECA-1B6 x 2 | 0 t ±1 kV | 6 mA | 2ch | 1 A |
| ECA-1B30 x 2 | 30 mA | 2ch | 3 A | |
| ECA-3B2 x 2 | 0 to ±3 kV | 2 mA | 2ch | 1 A |
| ECA-3B10 x 2 | 10 mA | 2ch | 3 A | |
| ECA-5B1 x 2 | 0 to ±5 kV | 1 mA | 2ch | 1 A |
| ECA-5B6 x 2 | 6 mA | 2ch | 3 A | |
| ECA-10B1 x 2 | 0 to ±10 kV | 1 mA | 2ch | 1 A |
| ECA-10B0.5 | 0.5 mA | 1ch | 1 A | |
| ECA-10B3 | 3 mA | 1ch | 3 A | |
Specifications
For details, download the datasheet below.
Example of waveform
Example of forced discharge and Output relay
Options
- -LPo
-
Polarity change
Local: toggle switch
Remote: contact input (for each channel)
- -LRf(13.56M)
-
RF filter 13.56 MHz
- -LRf(500k)
-
RF filter 500 kHz
- -LRy
-
Output relay
Function to separate PS and load electrically by remote control
- -LVI
-
Output voltage-limiter
0% to 100% controllable with front panel potentiometer.
- -L(7m)
-
High Voltage output cable 7m length x 2
Note: Wide range of filter frequency is available optionally. Please consult to sales staff.
Unipolar type is available.
How to Order
When ordering, add Option No. to Model No. in alphabetical, order followed by numerical, and the cable length. Example: ECA-1B6x2-LPoRf(13.56M)RyVI(7m)
Accessories
| Standard 115 V input * |
CABLE TYPE1 |  |
 |
125 V / 10 A | 2.5 meters Fixed length |
|---|
*: Purchace CABLE TYPE 3 input cable when input voltage is 200 V.
| Standard [1 kV to 5 kV models] |
CN-BNC-HVPP(5)* |
 MHV connector on both end |
5 meters |
|---|---|---|---|
| Standard [10 kV models] |
CN-15-MHVP(5)* |
 Flying lead |
5 meters |
*: Standard is “(5)”. It will be “(7)” when selected -L(7m) option.
Dimensions
Download
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
ECA series Instruction Manual
Date: 2021-06-03 rev. 3.0
PDF (721 KB)
The account registration is necessary for downloading
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
ECA series Instruction Manual
Date: 2021-06-03 rev. 3.0
PDF (721 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
