• ECA series | Electrostatic Chuck power supply Rackmount  | Matsusada Precision
  • ECA series | Electrostatic Chuck power supply Rackmount  | Matsusada Precision

Electrostatic chuck power supply

- Dual output fast response rack mount

  • Single
  • 2ch output (Some models)

Single/2ch output, Rackmount and Bipolar type ±1 kV to ±10 kV/5 W, 6 W, 10 W, 30 W

ECA series is a high voltage power supply developed especially for electrostatic chuck application. The wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity. This electrostatic chuck power supply is a convenient power supply suitable for unipolar systems (2ch) or bipolar systems. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.

Features and Benefits

  • Specially designed for Electrostatic Chuck application
  • 2 output channels
  • Bipolar output
  • Built-in RF filter is available. (option)
  • Fast response with electronically polarity change
  • Uses no relay, so high reliability and long life

Main application


Model Output Channel Input Current [A]
(at AC115 V) max
Voltage [kV] Current [mA]
ECA-1B6 x 2 0 t ±1 kV 6 mA 2ch 1 A
ECA-1B30 x 2 30 mA 2ch 3 A
ECA-3B2 x 2 0 to ±3 kV 2 mA 2ch 1 A
ECA-3B10 x 2 10 mA 2ch 3 A
ECA-5B1 x 2 0 to ±5 kV 1 mA 2ch 1 A
ECA-5B6 x 2 6 mA 2ch 3 A
ECA-10B1 x 2 0 to ±10 kV 1 mA 2ch 1 A
ECA-10B0.5 0.5 mA 1ch 1 A
ECA-10B3 3 mA 1ch 3 A


For details, download the datasheet below.


-LPo: Polarity change

  • Local: toggle switch
  • Remote: contact input (for each channel)

-LRf(13.56M): RF filter 13.56 MHz

-LRf(500k): RF filter 500 kHz

-LRy: Output relay

Function to separate PS and load electrically by remote control

-LVI: Output voltage-limiter

0% to 100% controllable with front panel potentiometer.

-L(7m): High Voltage output cable 7m length x 2


How to Order

When ordering, add Option No. to Model No. in alphabetical, order followed by numerical, and the cable length.


Input/Output cable (Accessories)

Input cable

115 V input *1
with 3-pin plug
  • CABLE TYPE 1 Power Input End
  • CABLE TYPE 1 Input Plug

High voltage Output cable

1 kV to 5 kV models
HV-BNC connector on both end
  • CN-BNC-HVPP(5)
10 kV models
CN-15-MHVP(5) *2
Flying lead
  • CN-15-MHVP(5)
  1. Purchase CABLE TYPE 3 input cable when input voltage is 200 V.
  2. Standard is "(5)". It will be "(7)" when selected -L(7m) option.


For details, download the datasheet below.


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