• ECA series
  • ECA series

ECA series

Electrostatic chuck power supply

- Dual output fast response rack mount

  • Single
  • 2ch output (Some models)

Single/2ch output, Rack mount and Bipolar type ±1 kV to ±10 kV/5 W, 6 W, 10 W, 30 W

ECA series is a high voltage power supply developed especially for electrostatic chuck application. The wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity. This is an useful power supply suitable both for unipolar systems (2ch) or bipolar systems. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.

Features and Benefits

  • Specially designed for Electrostatic Chuck application
  • 2 output channels
  • Bipolar output
  • Built-in RF filter is available. (option)
  • Fast response with electronically polarity change
  • Uses no relay, so high reliability and long life

Models

Model Output Channel Input Current [A]
(at 115 V) max
Voltage [kV] Current [mA]
ECA-1B6 x 2 0 t ±1 6 2ch 1
ECA-1B30 x 2 0 t ±1 30 2ch 3
ECA-3B2 x 2 0 to ±3 2 2ch 1
ECA-3B10 x 2 0 to ±3 10 2ch 3
ECA-5B1 x 2 0 to ±5 1 2ch 1
ECA-5B6 x 2 0 to ±5 6 2ch 3
ECA-10B1 x 2 0 to ±10 1 2ch 0.1
ECA-10B0.5 0 to ±10 0.5 1ch 1
ECA-10B3 0 to ±10 3 1ch 3

Specifications

For details, download the datasheet below.

Options

-LPo: Polarity change

  • Local: toggle switch
  • Remote: contact input (for each channel)

-LRf(13.56M): RF filter 13.56 MHz

-LRf(500K): RF filter 500 kHz

-LRy: Output relay

Function to separate PS and load electrically by remote control

-LVI: Output voltage-limiter

0% to 100% controllable with front panel potentiometer.

-L(7m): HV output cable 7m length x 2

Note:

How to Order

When ordering, add Option No. to Model No. in alphabetical, order followed by numerical, and the cable length.
Example:
ECA-1B6x2-LPoRf(13.56M)RyVI(7m)

Dimensions

For details, download the datasheet below.

Cable

Input/Output cable (Accessories)

Input cable

115 V input *1
CABLE TYPE 1
with 3-pin plug
  • CABLE TYPE 1 Power Input End
  • CABLE TYPE 1 Input Plug

Output cable

1 kV to 5 kV models
CN-BNC-HVPP(5) *2
HV-BNC connector on both end
  • CN-BNC-HVPP(5)
10 kV models
CN-15-MHVP(5) *2
Flying lead
  • CN-15-MHVP(5)
  1. Purchase CABLE TYPE 3 input cable when input voltage is 200 V.
  2. Standard is "(5)". It will be "(7)" when selected -L(7m) option.

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