Electrostatic Chuck Power Supply Reversible Output Module
High Voltage Power Supply
ELECTROSTATIC CHUCK POWER SUPPLY REVERSIBLE MODULE
MEC series is a high-voltage power supply developed especially for electrostatic chuck (E-Chuck, ESC) applications. Compact module type and easy to integrate into a system. Smooth wafer release is possible with polarity change by remote control. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.
FEATURES AND BENEFITS
- Specially designed for Electrostatic Chuck (E-Chuck, ESC) applications
- Smooth release of wafer with polarity reverse function
- Polarity change and output voltage control with remote signal
- Output Voltage and Current monitor
MAIN APPLICATION
Models
Specifications
For details, download the datasheet below.
Example of waveform
Character of output voltage setting
Options
- -L(1m)
-
High Voltage output cable 1 meter
- -L(3m)
-
High Voltage output cable 3 meters
- -L(5m)
-
High Voltage output cable 5 meters
How to Order
When ordering, add Option No. to Model No. in alphabetical, order.
Example: MEC-1R10-L(1m)
Diagram
Dimensions
Download
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
The account registration is necessary for downloading
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
