• MEC series | Electrostatic Chuck power supply Module | Matsusada Precision
  • MEC series | Electrostatic Chuck power supply Module | Matsusada Precision

Electrostatic chuck (E-chuck) power supply -Reversible output module

High Voltage Power Supply

Electrostatic chuck power supplies -Reversible module type

MEC series is a high voltage power supply developed especially for electrostatic chuck applications. Compact module type and easy to integrate into a system. Smooth wafer release is possible with polarity change by remote control. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.

Features and Benefits

  • Specially designed for Electrostatic Chuck applications
  • Smooth release of wafer with polarity reverse function
  • Polarity change and output voltage control with remote signal
  • Output Voltage and Current monitor

Applications

Models

Model Output
Voltage [kV] Current [mA]
MEC-1R10 0 to ±1 10
MEC-1.5R6.6 0 to ±1.5 6.6
MEC-2R5 0 to ±2 5
MEC-3R3.3 0 to ±3 3.3
MEC-5R2 0 to ±5 2
MEC-10R1 0 to ±10 1

Specifications

For details, download the datasheet below.

Options

-L(1m): High Voltage output cable 1 meter

-L(3m): High Voltage output cable 3 meters

-L(5m): High Voltage output cable 5 meters

How to Order

When ordering, add Option No. to Model No. in alphabetical, order.
Example:
MEC-1R10-L(1m)

Dimensions

For details, download the datasheet below.

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