• EJC series | Electrostatic Chuck power supply Benchtop | Matsusada Precision
  • EJC series | Electrostatic Chuck power supply Benchtop | Matsusada Precision

E-chuck High Voltage Power Supply

  • Max Voltage: -5V to +5V
  • Max Current: 30mA
  • Max Power: 30W
  • Single channel output

Single channel, Handy Bipolar type ±1 kV to ±5 kV/6 W, 30 W

EJC series is a high voltage power supply developed especially for electrostatic chuck applications. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±5 kV.

Features and Benefits

  • Specially designed for Electrostatic Chuck applications
  • Fast response (100 ms) with electronically polarity change
  • Bipolar output
  • Integrated RF filter (optional)
  • Long life and high reliability with no relay

Main applications

  • Electrostatic Chuck (E-Chuck)

Models

Model Output
Voltage [kV] Current [mA]
EJC-1B6 -1 to +1 6
EJC-1B30 30
EJC-2B3 -2 to +2 3
EJC-2B15 15
EJC-3B2 -3 to +3 2
EJC-3B10 10
EJC-4B1.5 -4 to +4 1.5
EJC-4B7.5 7.5
EJC-5B1.2 -5 to +5 1.2
EJC-5B6 6

Specifications

For details, download the datasheet below.

Options

-LB: Protective cover

For POWER switch and HV switch

-LPo: Polarity change

  • Local: toggle switch
  • Remote: contact input

-LRf(13.56M): RF filter 13.56 MHz

-LRf(500k): RF filter 500 kHz

-LRy: Output relay

Function to separate PS and load electrically by remote control

-L(7m): HV output cable 7 m length x 2

Note:
-LRy option and -LRf option cannot be selected together. Need to be selected either one.
Wide range of filter frequency is available optionally. Please consult to sales staff.
Unipolar type is available.

How to Order

When ordering, add Option No. to Model No. in alphabetical, order followed by numerical, and the cable length.
Example:
EJC-1B6-LBPoRf(13.56M)Ry(7m)

Cable

Input/Output cable (Accessories)

Input cable

115 V input *1
CABLE TYPE 1
with 3-pin plug
  • CABLE TYPE 1 Power Input End
  • CABLE TYPE 1 Input Plug

Output cable

1 kV to 5 kV models
CN-BNC-HVPP(5) *2
HV-BNC connector on both end
  • CN-BNC-HVPP(5)
  1. Purchase CABLE TYPE 3 input cable when input voltage is 200 V.
  2. Standard is "(5)". It will be "(7)" when selected -L(7m) option.

Dimensions

For details, download the datasheet below.

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