• EJC series | Electrostatic Chuck power supply Benchtop | Matsusada Precision
  • EJC series | Electrostatic Chuck power supply Benchtop | Matsusada Precision

E-chuck High Voltage Power Supply

  • Max Voltage: -5V to +5V
  • Max Current: 30mA
  • Max Power: 30W
  • Single channel output

Single channel, Handy Bipolar type ±1 kV to ±5 kV/6 W, 30 W

EJC series is a high voltage power supply developed especially for electrostatic chuck applications. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of the wafer is also possible by reversing the polarity. Correspond to both Johnsen-Rahbek type, and Coulomb type because of wide product range ±1 kV to ±5 kV.

Features and Benefits

  • Specially designed for Electrostatic Chuck applications
  • Fast response (100 ms) with electronically polarity change
  • Bipolar output
  • Integrated RF filter (optional)
  • Long life and high reliability with no relay

Main application


Model Output
Voltage [kV] Current [mA]
EJC-1B6 -1 to +1 kV 6 mA
EJC-1B30 30 mA
EJC-2B3 -2 to +2 kV 3 mA
EJC-2B15 15 mA
EJC-3B2 -3 to +3 kV 2 mA
EJC-3B10 10 mA
EJC-4B1.5 -4 to +4 kV 1.5 mA
EJC-4B7.5 7.5 mA
EJC-5B1.2 -5 to +5 kV 1.2 mA
EJC-5B6 6 mA


For details, download the datasheet below.


-LB: Protective cover

For POWER switch and High Voltage switch

-LPo: Polarity change

  • Local: toggle switch
  • Remote: contact input

-LRf(13.56M): RF filter 13.56 MHz

-LRf(500k): RF filter 500 kHz

-LRy: Output relay

Function to separate PS and load electrically by remote control

-L(7m): High voltage output cable 7 meters length x 2

-LRy option and -LRf option cannot be selected together. Need to be selected either one.
Wide range of filter frequency is available optionally. Please consult to sales staff.
Unipolar type is available.

How to Order

When ordering, add Option No. to Model No. in alphabetical, order followed by numerical, and the cable length.


Input/Output cable (Accessories)

Input cable

115 V input *1
with 3-pin plug
  • CABLE TYPE 1 Power Input End
  • CABLE TYPE 1 Input Plug

High-voltage Output cable

1 kV to 5 kV models
HV-BNC connector on both end
  • CN-BNC-HVPP(5)
  1. Purchase CABLE TYPE 3 input cable when input voltage is 200 V.
  2. Standard is "(5)". It will be "(7)" when selected -L(7m) option.


For details, download the datasheet below.


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