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  • EJC series | Electrostatic Chuck power supply Benchtop | Matsusada Precision
  • EJC series | Electrostatic Chuck power supply Benchtop | Matsusada Precision

E-chuck High Voltage Power Supply

Halfrack width space-saving design

  • -5V to +5V
  • 30W
  • Single channel output
  • Fast response model

Single channel, Benchtop Bipolar type ±1 kV to ±5 kV/6 W, 30 W

EJC series is a high voltage power supply developed especially for electrostatic chuck applications. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of the wafer is also possible by reversing the polarity. Correspond to both Johnsen-Rahbek type, and Coulomb type because of the wide product range ±1 kV to ±5 kV.

Features and Benefits

  • Specially designed for Electrostatic Chuck applications
  • Fast response (100 ms) with amplifier structure
  • Bipolar output
  • Integrated RF filter (optional)
  • Long life and high reliability with no relay

Models

Model Output
Voltage [kV] Current [mA]
EJC-1B6 -1 to +1 kV 6 mA
EJC-1B30 30 mA
EJC-2B3 -2 to +2 kV 3 mA
EJC-2B15 15 mA
EJC-3B2 -3 to +3 kV 2 mA
EJC-3B10 10 mA
EJC-4B1.5 -4 to +4 kV 1.5 mA
EJC-4B7.5 7.5 mA
EJC-5B1.2 -5 to +5 kV 1.2 mA
EJC-5B6 6 mA

Specifications

For details, download the datasheet below.

Example of waveform

Example of waveform | EJC series | Electrostatic Chuck Power Supplies | Matsusada Precision

Options

-LB

Protective cover
For POWER switch and High Voltage switch

-LPo

Polarity change
Local: toggle switch
Remote: contact input

-LRf(13.56M)

RF filter 13.56 MHz

-LRf(500k)

RF filter 500 kHz

-LRy

Output relay
Function to separate PS and load electrically by remote control

L(7m)

High voltage output cable 7 meters length x 2

Note: -LRy option and -LRf option cannot be selected together. Need to be selected either one.
Wide range of filter frequency is available optionally. Please consult to sales staff.
Unipolar type is available.

How to Order

When ordering, add Option No. to Model No. in alphabetical, order followed by numerical, and the cable length. Example: EJC-1B6-LBPoRf(13.56M)Ry(7m)

Accessories

Input cable
Standard
[115 V input *]
CABLE TYPE1 CABLE series | AC input cable | Matsusada Precision CABLE series | AC input cable | Matsusada Precision 125 V / 10 A 2.5 meters

Fixed length

*: Purchase CABLE TYPE 3 input cable when input voltage is 200 V.

Output cable
Standard
[1 kV to 5 kV models]
CN-BNC-HVPP(5)* CN-BNC-HVPP(5)
MHV connector on both end
5 meters

*: Standard is “(5)”. It will be “(7)” when selected -L(7m) option.

Dimensions

For details, download the datasheet below.

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