Compact HV supply for E-chuck application
ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse (except for some models) function.
Features and Benefits
- Designed for Electrostatic Chuck (E-chuck) application
- + and -, 2 outputs type
- Output reversible and grounding function for smooth release
- RF filter integrated
- Local, Remote, or RS-232C control
Applications
- Electrostatic chuck
Models
More high voltage models are available. Contact nearby sales office.
| Models | Maximum Output | |
|---|---|---|
| Voltage [kV] | Current [mA] | |
| ECU-0.5PN10 (R) | ±0.5 | 10 |
| ECU-1PN3 (R) | ±1 | 3 |
| ECU-1.5PN2 (R) | ±1.5 | 2 |
| ECU-2PN1 (R) | ±2 | 1 |
| ECU-2PN3 (R) | ±2 | 3 |
| ECU-4PN1 (R) | ±4 | 1 |
| ECU-5PN2 (R) | ±5 | 2 |
Specifications
Options
-L(7m): Output HV cable with HV-BCN connector on both end 7 m x 2
How to Order
- When ordering, add Option No. to Model No.
-
- Example:
- ECU-0.5PN10(R) -L(7m)
Cable
Output cable (Accessories)
- CN-BNC-HVPP(5) *
- HV-BNC connector on both end
-
Standard is "(5)". It will be "(7)" when selected -L(7m) option.
Dimensions
Download
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2021-03-05 rev. 07
PDF (3,686 KB)
-
ECU series Instruction Manual
PDF (707 KB)
The account registration is necessary for downloading
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2021-03-05 rev. 07
PDF (3,686 KB)
-
ECU series Instruction Manual
PDF (707 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.