ECU Series
E-chuck HV Power Supplies
+ and -, 2ch Unit type
Compact HV supplies for E-chuck application
ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.
Best fit for OEM application with its ultra compact design
Designed in quite compact chassis for OEM application, and has various useful functions for E-chuck applications including forced discharge, two channel output with one control voltage, digital remote control, etc.
Feature & Outline
- Designed for Electrostatic Chuck (E-chuck) application.
- + and -, 2 outputs type
- Output reversible and grounding function for smooth dechuck.
- RF filter integrated
- Local, Remote or RS-232C control
Applications
- Electrostatic chuck
Models
More high voltage models are available. Contact nearby sales office.
| Models | Output | |
|---|---|---|
| Voltage (kV) | Current (mA) | |
| ECU-0.5PN10 (R) | ±0.5 | 10 |
| ECU-1PN3 (R) | ±1 | 3 |
| ECU-1.5PN2 (R) | ±1.5 | 2 |
| ECU-2PN1 (R) | ±2 | 1 |
| ECU-2PN3 (R) | ±2 | 3 |
| ECU-4PN1 (R) | ±4 | 1 |
| ECU-5PN2 (R) | ±5 | 2 |
Option
-L (7m)
Output HV cable with HV-BCN connector on both end 7 m (2)
How to Order
When ordering, suffix the above option mark to the model number.[e.g.] ECU-0.5PN10 (R) -L (7 m)
Other
Output cable (accessory)
- CN-BNC-HVPP (5)*
with HV-BNC connector on both end （Standard）
-
-
*Standard is 5. It will be "7" when selected -L (7m) option.
Example
Example of waveform
Characteriseic of output Voltage Setting
Download
The account registration is necessary for downloading
-
ECU series Datasheet
PDF（192KB）
-
ECU Manual
PDF(707KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.