E-chuck High Voltage Power Supply
+ and -, 2 channel Unit type
- ±0.5kV to ±5kV
- 2W to 10W
- ±500V lineup
- RF filter as standard
Compact High Voltage power supply for E-chuck application
ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse (except for some models) function.
Features and Benefits
- Designed for Electrostatic Chuck (E-chuck) application
- + and -, 2 outputs type
- Output reversible and grounding function for smooth release
- RF filter integrated
- Local, Remote, or RS-232C control
Main application
Models
More high voltage models are available. Contact nearby sales office.
| Models | Maximum Output | |
|---|---|---|
| Voltage [kV] | Current [mA] | |
| ECU-0.5PN10 (R) | 0 to ±0.5 kV | 10 mA |
| ECU-1PN3 (R) | 0 to ±1 kV | 3 mA |
| ECU-1.5PN2 (R) | 0 to ±1.5 kV | 2 mA |
| ECU-2PN1 (R) | 0 to ±2 kV | 1 mA |
| ECU-2PN3 (R) | 0 to ±2 kV | 3 mA |
| ECU-4PN1 (R) | 0 to ±4 kV | 1 mA |
| ECU-5PN2 (R) | 0 to ±5 kV | 2 mA |
Specifications
For details, download the datasheet below.
Example of waveform
Character of output voltage setting
Options
- -L(7m)
-
Output High Voltage cable with HV-BNC connector on both end 7 m x 2
How to Order
When ordering, add Option No. to Model No.
Example: ECU-0.5PN10(R) -L(7m)
Accessories
| Standard | CN-BNC-HVPP(5) * |  MHV connector on both end |
5 meters (Specified length available) |
|---|
*: Standard is "(5)". It will be "(7)" when selected -L(7m) option.
Dimensions
Download
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2022-10-25 rev. 08
PDF (4,191 KB)
-
ECU series Instruction Manual
PDF (707 KB)
The account registration is necessary for downloading
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2022-10-25 rev. 08
PDF (4,191 KB)
-
ECU series Instruction Manual
PDF (707 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
