• ECU series
  • ECU series

ECU series

E-chuck HV Power Supply

+ and -, 2ch Unit type

Compact HV supply for E-chuck application

ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse (except for some models) function.

Features and Benefits

  • Designed for Electrostatic Chuck (E-chuck) application
  • + and -, 2 outputs type
  • Output reversible and grounding function for smooth release
  • RF filter integrated
  • Local, Remote, or RS-232C control



More high voltage models are available. Contact nearby sales office.

Models Maximum Output
Voltage [kV] Current [mA]
ECU-0.5PN10 (R) ±0.5 10
ECU-1PN3 (R) ±1 3
ECU-1.5PN2 (R) ±1.5 2
ECU-2PN1 (R) ±2 1
ECU-2PN3 (R) ±2 3
ECU-4PN1 (R) ±4 1
ECU-5PN2 (R) ±5 2


For details, download the datasheet below.


-L(7m): Output HV cable with HV-BCN connector on both end 7 m x 2

How to Order

When ordering, add Option No. to Model No.
ECU-0.5PN10(R) -L(7m)


Output cable (Accessories)

HV-BNC connector on both end
  • CN-BNC-HVPP(5)

Standard is "(5)". It will be "(7)" when selected -L(7m) option.


For details, download the datasheet below.


The account registration is necessary for downloading

In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.

Please click here if you are not registered yet to our site.

Membership Registration (Free)

Please click here if you are already registered to our site.

Log in

Information on related articles in Technical Knowledge

Electrostatic Chuck Power Supplies

Search for related to Electrostatic Chuck Power Supplies