• ECU series
  • ECU series

ECU series

E-chuck HV Power Supply

+ and -, 2ch Unit type

Compact HV supply for E-chuck application

ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse (except for some models) function.

Features and Benefits

  • Designed for Electrostatic Chuck (E-chuck) application
  • + and -, 2 outputs type
  • Output reversible and grounding function for smooth release
  • RF filter integrated
  • Local, Remote, or RS-232C control

Applications

Models

More high voltage models are available. Contact nearby sales office.

Models Maximum Output
Voltage [kV] Current [mA]
ECU-0.5PN10 (R) ±0.5 10
ECU-1PN3 (R) ±1 3
ECU-1.5PN2 (R) ±1.5 2
ECU-2PN1 (R) ±2 1
ECU-2PN3 (R) ±2 3
ECU-4PN1 (R) ±4 1
ECU-5PN2 (R) ±5 2

Specifications

For details, download the datasheet below.

Options

-L(7m): Output HV cable with HV-BCN connector on both end 7 m x 2

How to Order

When ordering, add Option No. to Model No.
Example:
ECU-0.5PN10(R) -L(7m)

Cable

Output cable (Accessories)

CN-BNC-HVPP(5) *
HV-BNC connector on both end
  • CN-BNC-HVPP(5)

Standard is "(5)". It will be "(7)" when selected -L(7m) option.

Dimensions

For details, download the datasheet below.

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