E-chuck HV Power Supplies
+ and -, 2ch Unit type
Compact HV supplies for E-chuck application
ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.
Best fit for OEM application with its ultra compact design
Designed in quite compact chassis for OEM application, and has various useful functions for E-chuck applications including forced discharge, two channel output with one control voltage, digital remote control, etc.
Feature & Outline
- Designed for Electrostatic Chuck (E-chuck) application.
- + and -, 2 outputs type
- Output reversible and grounding function for smooth dechuck.
- RF filter integrated
- Local, Remote or RS-232C control
- Electrostatic chuck
More high voltage models are available. Contact nearby sales office.
Output HV cable with HV-BCN connector on both end 7 m (2)
How to OrderWhen ordering, suffix the above option mark to the model number.
[e.g.] ECU-0.5PN10 (R) -L (7 m)
Output cable (accessory)
- CN-BNC-HVPP (5)*
with HV-BNC connector on both end （Standard）
*Standard is 5. It will be "7" when selected -L (7m) option.
Example of waveform
Characteriseic of output Voltage Setting
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ECU series Datasheet
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