• ECU Series
  • ECU Series

ECU Series

E-chuck HV Power Supplies

+ and -, 2ch Unit type

Compact HV supplies for E-chuck application

ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.

Best fit for OEM application with its ultra compact design

Designed in quite compact chassis for OEM application, and has various useful functions for E-chuck applications including forced discharge, two channel output with one control voltage, digital remote control, etc.

Feature & Outline

  • Designed for Electrostatic Chuck (E-chuck) application.
  • + and -, 2 outputs type
  • Output reversible and grounding function for smooth dechuck.
  • RF filter integrated
  • Local, Remote or RS-232C control

Applications

  • Electrostatic chuck

Models

More high voltage models are available. Contact nearby sales office.

Models Output
Voltage (kV) Current (mA)
ECU-0.5PN10 (R) ±0.5 10
ECU-1PN3 (R) ±1 3
ECU-1.5PN2 (R) ±1.5 2
ECU-2PN1 (R) ±2 1
ECU-2PN3 (R) ±2 3
ECU-4PN1 (R) ±4 1
ECU-5PN2 (R) ±5 2

Option

-L (7m)

Output HV cable with HV-BCN connector on both end 7 m (2)

How to Order

When ordering, suffix the above option mark to the model number.

[e.g.] ECU-0.5PN10 (R) -L (7 m)

Other

Output cable (accessory)

CN-BNC-HVPP (5)*

with HV-BNC connector on both end (Standard)

  • CN-BNC-HVPP(5)

*Standard is 5. It will be "7" when selected -L (7m) option.

Example

Example of waveform

Example of waveform

Characteriseic of output Voltage Setting

Characteriseic of output Voltage Setting

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