ECG series is no longer available as we stopped the production and sales of this model in November 2020. Meanwhile, we support.
Single Output, Rack-mount Reversible type -1 kV to +1 kV/±10 W
ECG Series are high voltage power supplies developed especially for electrostatic chuck application. The wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity. The polarity can be reversed by the switch on the front panel or the contact signal. Also, it is possible to output zero-cross bipolar output with the external control voltage.
Features and Benefits
- Specially designed for Electrostatic Chuck (E-chuck) application
- Fast response with electronically polarity change
- Bipolar Output
- Uses no relay, so high reliability and long life
Main application
Models
| Model | Output | Input Current (at AC100 V) max |
|
|---|---|---|---|
| Voltage [kV] | Current [mA] | ||
| ECG-1B10 | 0 to ±1 kV | 10 mA | 1 A |
Specifications
Dimensions
Download
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ECG series Datasheet
PDF（146KB）
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
The account registration is necessary for downloading
-
ECG series Datasheet
PDF（146KB）
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
