E-Chuck High Voltage Power Supply
Halfrack width space-saving design
- -5V to +5V
- 30W
- Single channel output
- Fast response model
Single channel, Benchtop Bipolar type ±1 kV to ±5 kV/6 W, 30 W
EJC series is a high-voltage power supply developed especially for electrostatic chuck (E-Chuck, ESC) applications. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of the wafer is also possible by reversing the polarity. Correspond to both Johnsen-Rahbek type, and Coulomb type because of the wide product range ±1 kV to ±5 kV.
Features and Benefits
- Specially designed for Electrostatic Chuck (E-Chuck, ESC) applications
- Fast response (100 ms) with amplifier structure
- Bipolar output
- Integrated RF filter (optional)
- Long life and high reliability with no relay
Main application
Models
Specifications
For details, download the datasheet below.
Example of waveform
Options
- -LB
-
Protective cover
For POWER switch and High Voltage switch
- -LPo
-
Polarity change
Local: toggle switch
Remote: contact input
- -LRf(13.56M)
-
RF filter 13.56 MHz
- -LRf(500k)
-
RF filter 500 kHz
- -LRy
-
Output relay
Function to separate PS and load electrically by remote control
- L(7m)
-
High voltage output cable 7 meters length x 2
Note: -LRy option and -LRf option cannot be selected together. Need to be selected either one.
Wide range of filter frequency is available optionally. Please consult to sales staff.
Unipolar type is available.
How to Order
When ordering, add Option No. to Model No. in alphabetical, order followed by numerical, and the cable length. Example: EJC-1B6-LBPoRf(13.56M)Ry(7m)
Accessories
| Standard [115 V input *] |
CABLE TYPE1 |  |
 |
125 V / 10 A | 2.5 meters Fixed length |
|---|
*: Purchase CABLE TYPE 3 input cable when input voltage is 200 V.
| Standard [1 kV to 5 kV models] |
CN-BNC-HVPP(5)* |
 MHV connector on both end |
5 meters |
|---|
*: Standard is “(5)”. It will be “(7)” when selected -L(7m) option.
Dimensions
Download
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2022-10-25 rev. 08
PDF (4,191 KB)
-
EJC series Instruction Manual
PDF (255 KB)
The account registration is necessary for downloading
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2022-10-25 rev. 08
PDF (4,191 KB)
-
EJC series Instruction Manual
PDF (255 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
