- Automated Test Equipment (ATE)
- Dielectric Breakdown Testing
- Electrical isolation test
- Electron Beam
- Electron Beam (E-Beam) Evaporation
- Electron Beam Lithography (EBL)
- Electron Beam (E-Beam) Welding
- Electron Microscope
- Electrostatic chuck
- Electrostatic Discharge (ESD) Testing
- Electrostatic levitation
- High Voltage AMP
- High Voltage Power Supply
- Insulation breakdown test
- Ion Beam
- Ion Beam Deposition
- Ion Implantation
- Ionizer
- Non Destructive Testing (NDT)
- Photodiode
- Photovoltaics (PV)
- Physical Vapor Deposition (PVD)
- Plating
- Power Amplifier
- Scanning Electron Microscope (SEM)
- Semiconductor burn-in device
- Semiconductor Fabrication Equipment
- Vacuum Plasma Treatment
- X-Ray Analysis
- X-Ray Photoelectron Spectroscopy (XPS)
Semiconductor
Semiconductor Manufacturing Process
| Process | Matsusada Products/purpose |
|---|---|
| 1. Ingot Growth | - |
| 2. Ingot Slicing | - |
| 3. Wafer Cleaning | Vacuum Plasma Treatment |
| 4. Wafer Polishing | Piezo actuator, Piezo driver |
| 5. Thermal Oxide Wafer | Heater power supply |
| 6. Photoresist Coating | - |
| 7. Photolithography | Electron Beam Lithography (EBL) Piezo actuator, Piezo driver |
| 8. Stepper exposure | Piezo actuator, Piezo driver |
| 9. Etching | Electrostatic chuck |
| 10. Deposition | Electron Beam (E-Beam) Evaporation Ion Beam Deposition Heater power supply |
| 11. Chemical Mechanical Planarization (CMP) | - |
| 12. Oxidation | - |
| 13. Ion inprantation | Ion Beam, Ion Acceleration, Ion Beam Steering, Ion Source |
| 14. Diffusion | - |
| 15. Wafer Inspection | - |
| 16. Wafer dicing | Electrostatic chuck |
| 17. Wafer mounting | - |
| 18. Wafer bonding | Plating |
| 19. Integrated circuit packaging | Electron Beam (E-Beam) Welding |
| 20. Burn-in | Semiconductor burn-in device |
| 21. Testing and Inspection | Electron Microscope High Voltage Power Supply Analytical X-Ray Dielectric Breakdown Testing Electrostatic Discharge Testing (ESD) Insulation breakdown testing Electrical isolation test |
| 22. Marking | - |