Vacuum plasma treatment (low-pressure plasma treatment) is a technology for cleaning and surface treatment of materials by uniformly irradiating the surface of the material with plasma in a vacuum. It is used in a wide range of fields, from the manufacture of semiconductors and electronic components to medical applications.

Plasma treatment cleans materials by decomposing and vaporizing microscopic organic matter adhering to the material surface. It also has the effect of surface modification by breaking molecular bonds on the material surface and changing the surface composition. In addition, the plasma decorates the surface of the material with hydroxyl groups, making it hydrophilic and less likely to repel liquids.

Vacuum plasma treatment is used, for example, in the manufacture of microchips to improve the hydrophilicity of the surface of patterned PDMS (dimethylpolysiloxane) and to improve pattern adhesion. In vacuum plasma processing, plasma is generated by applying a high-voltage current to electrodes and filaments inside a vacuum device.

Matsusada Precision offers a wide range of high-voltage power supplies for heating electrodes and filaments.

Plasma Treatment
how plasma-treatment bonding works
Related words:
  • Plasma
  • Semiconductor
  • Surface Treatment

Recommended products

Power supplies for vacuum plasma processing are available.

TA series

TA series

output voltage
0 to 2 kV
output current
0 to 1.5 mA
output power
0 to 1.5 W
Ultra-compact HV power supply for PMTs

Low ripple, Space-saving, and High reliability

TC series

TC series

output voltage
0 to 2kV
output current
0 to 1.5mA
output power
0 to 1.5W
Ultra-compact HV power supply for PMTs

Low ripple, Space-saving, and High reliability

TG series

TG series

output voltage
0 to 2kV
output current
0 to 7.5mA
output power
0 to 1.5W
Ultra-compact HV power supply for PMTs

A wide range of output voltage

TU-M series

TU-M series

output voltage
0 to 1.2kV
output current
0 to 0.6mA
output power
0 to 720mW
Miniature HV power supply

Ultra compact and high performance

TFQ series

TFQ series

output voltage
0 to 1.5kV
output current
0 to 1mA
output power
0 to 1.5W
Ultra compact High Voltage Power Supply

Wide range of output voltage

ES series

ES series

output voltage
0 to +5 kV/-5 kV
output current
0 to 15 mA
output power
0 to 15 W
Wide lineup that can select the optimum one

Wide lineup, Compact bench top units for PMT, MCP applications

TM series

TM series

output voltage
0 to 3kV
output current
0 to 2mA
output power
0 to 1.6W
Ultra Low Ripple PCB Mountable High Voltage Power Supply

Low ripple, high stability

TD series

TD series

output voltage
0 to 2kV
output current
0 to 14mA
output power
0 to 5W
High power Power Supply for photomultiplier

Low ripple/noise and high-end performance

TEH series

TEH series

output voltage
0 to 1kV
output current
0 to 20mA
output power
0 to 10W
High power HV Power Supply

High power 10W for PMT

AE/AF series

AE/AF series

output voltage
0 to 150kV/-150kV
output current
0 to 120mA
output power
0 to 300W
Ultra low noise and overwhelming high stability

High stability 50ppm/Hr, Digital interface is available. Ultra low ripple 10ppm and spike noise with our proprietary switching circuit

AES/AESS series

AES/AESS series

output voltage
to 30kV
output current
0 to 6mA
output power
0 to 30W
SEM/Semiconductor inspection system

Low temperature coefficient 25 ppm/°C, For SEM, E-beam and FIB applications, Ultra low ripple 2 ppm and high stability 10 ppm/Hr

AU series

AU series

output voltage
0 to +120kV/-120kV
output current
0 to 2.2A
output power
0 to 2.2kW
Low profile and lightweight

Digital interface is available.Wide lineup of over 300 models, Various remote control and monitor functions

J4/J6 series

J4/J6 series

output voltage
0 to 5kV
output current
0 to 8mA
output power
6W Max
High Voltage Power Supply for PMT

Ideal for photo tubes, GM tubes, and radiation counters

JB series

JB series

output voltage
0 to 2kV
output power
0 to 2.5W
output current
0 to 8mA
High Voltage Power Supply for PMT

High power and Low noise

ASX series

ASX series

output voltage
0 to +3.1 kV/-3.1 kV
output current
0 to 5 mA
output power
0 to 15.5 W
Bestseller model among various international research institutes

Ultra-low ripple 1mVp-p with high stability 50ppm/H, Perfect for driving photomultiplier tubes