Ion implantation is a method of changing the properties of a solid or modifying its surface by accelerating and injecting ionized atoms or molecules into the solid. In particular, the method of implanting impurity elements to form semiconductors, called dopants, is called doping technology, and is the most widely used method of ion implantation.

A typical ion implanter consists of several parts, including an ion source to generate the target ions, a mass spectrometer to extract the necessary ions, an accelerator tube to accelerate the ions, a scanning section to scan the ion beam, and a section to detect the dose. The end station, where ions are injected into the solid, is under high vacuum conditions.

Matsusada Precision offers a wide variety of high voltage power supplies such as high voltage filament power supplies for ion sources, high voltage power supplies for extraction grids, constant current power supplies for analyzer magnets, high voltage power supplies up to 200kV for ion acceleration, fast high voltage bipolar power supplies for ion beam scanning, and high voltage power supplies for secondary electron suppression.

Simulation of a Ion implantation
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Matsusada Precision offers a wide variety of high voltage power supplies such as high voltage filament power supplies for ion sources, high voltage power supplies for extraction grids, constant current power supplies for analyzer magnets, high voltage power supplies up to 200kV for ion acceleration, fast high voltage bipolar power supplies for ion beam scanning, and high voltage power supplies for secondary electron suppression.

HIB series

HIB series

output voltage
0 to 60 kV/-30 kV
output current
0 to 5 A
Ion Beam Power Supply

Each channel can be selected separately

PBR series

PBR series

output voltage
0 to 1500V
output current
0 to 360A
output power
0 to 15kW
Regenerative DC power supply

Bidirectional Power Supply with Power Running and Regeneration

PRT series

PRT series

output votage
0 to 1500V
output current
0 to 510A
output power
0 to 15kW
High Power DC Turbo Power Supply

Achieve a wide range of output, Variable internal resistance function

AKP series

AKP series

output voltage
0 to +120 kV/-120 kV
output current
0 to 13 A
output power
0 to 13 kW
High voltage and Large output

Master/slave function further enables extension at maximum 52 kW.

AK series

AK series

output voltage
0 to +120 kV/-120 kV
output current
0 to 4.25 A
output power
0 to 6.4 kW
High power 6.4 kW/Compact

6.4 kW in 4 U, Digital interface is available. Wide lineup of over 100 models

AU series

AU series

output voltage
0 to +120kV/-120kV
output current
0 to 2.2A
output power
0 to 2.2kW
Low profile and lightweight

Digital interface is available.Wide lineup of over 300 models, Various remote control and monitor functions

REK/REKJ series

REK/REKJ series

output votage
0 to 1500V
output current
0 to 1200A
output power
0 to 15kW
Versatile, High-performance

Compact and High power, PFC circuit and universal input, Various operations is available

TB series

TB series

output voltage
0 to 1000V
output current
0 to 108A
output power
0 to 1080W
Wide range output/Turbo power supply

"Turbo function" installed, Compact size, Suppressing voltage/current overshoot

DRS series

DRS series

output voltage
0 to 310V
output current
0 to 20A
output power
0 to 2000VA
Ultra-compact and Multifunction

Simple operations and high power in overwhelming compact size

DRK series

DRK series

output voltage
0 to 300Vac
output current
0 to 80A
output power
0 to 8kVA
High power and Versatile AC power supply

Compact DC and AC output power supply

K12-R series

K12-R series

output voltage
0 to +30 kV/-30 kV
output current
0 to 1.2 mA
output power
0 to 12 W
Reversible Polarity & High Stability

Ideal for SEM and MASS

K3-R series

K3-R series

output voltage
0 to +10 kV/-10 kV
output current
0 to 3 mA
output power
0 to 3 W
MASS spectrometer reversible power supplies

Ideal for SEM and MASS