Ion beam steering is used in ion beam scanning. Ions which are extracted from the ion source are focused by a condenser lens (CL), and the ion beam is scanned by an electrostatic deflector. Ion beams are used for a wide range of applications such as ion beam implantation, ion beam processing and scanning ion microscope (SIM).

Matsusada power supplies designed for electrostatic deflectors have various kinds of specifications, and especially we provide high voltage amplifiers featuring the world's highest level of response speed. With the DC bias function, the scanning reference point of scanning can be easily adjusted.

FIB diagram which involved focusing and steering the ion beam

Recommended products

HIB series

HIB series

output voltage
0 to 60 kV/-30 kV
output current
0 to 5 A
Ion Beam Power Supply

Each channel can be selected separately

AKP series

AKP series

output voltage
0 to +120 kV/-120 kV
output current
0 to 13 A
output power
0 to 13 kW
High voltage and Large output

Master/slave function further enables extension at maximum 52 kW.

AK series

AK series

output voltage
0 to +120 kV/-120 kV
output current
0 to 4.25 A
output power
0 to 6.4 kW
High power 6.4 kW/Compact

6.4 kW in 4 U, Digital interface is available. Wide lineup of over 100 models

AU series

AU series

output voltage
0 to +120kV/-120kV
output current
0 to 2.2A
output power
0 to 2.2kW
Low profile and lightweight

Digital interface is available.Wide lineup of over 300 models, Various remote control and monitor functions

AUH series

AUH series

output voltage
0 to 200kV
output power
0 to 2kW
output current
0 to 13.3mA
Ultra high voltage, High power

High power of 2 kW, Safety design, Ultra high voltage of maximum 200 kV in the 19-inch rack size

SK series

SK series

output voltage
0 to 10 kV
output current
0 to 20 mA
output power
0 to 200 W
High voltage/High speed pulse power supply

Ultra compact and light weight design, High power design applicable in low impedance

SKS series

SKS series

output voltage
0 to 10kV
output current:
0 to 10mA avg.
High-Speed High-Voltage Pulse Power Supply

High-speed operation with 50 kHz repetition frequency

AMPS series

AMPS series

output voltage
0 to ±30kV
output current
0 to ±2A
output power
0 to 1.2kW
Ultra high speed/High voltage

Ultra high slew rate 1200 V/µs, High-speed response of frequency bandwidth 100 kHz

AMP series

AMP series

output voltage
0 to ±40 kV
output current
0 to ±2A
output power
0 to 1.2kW
Fast response of slew rate 700 V/µ s

Slew rate with actual load is as high as 700 V/µs.

AMS/AMT series

AMS/AMT series

output voltage
0 to ±20kV
output current
0 to ±200W
output power
0 to 100mA
Fast response of slew rate 360V/µs

High speed response 360 V/µs, DC bias function, Various types of output wave forms according to the input wave

AMJ series

AMJ series

output voltage
0 to ±4kV
output current
0 to ±80mA
output power
0 to 40W
Ultra Compact and Fast Response

High speed response 75kHz, DC bias function

ECA series

ECA series

output voltage
0 to ±10kV
output current
0 to 30mA
output power
0 to 30W
Electrostatic chuck

Fast response, High reliability and long life

ECU series

ECU series

output voltage
0 to ±5kV
output current
0 to 10mA
output power
0 to 10W
Electrostatic chuck

Output reversible and forced discharge, Local, Remote or RS-232C

KAS-R series

KAS-R series

output voltage
0 to +30 kV/-30 kV
output current
0 to 10 mA
output power
0 to 10 W
MASS Spectrometry High Voltage Power Supply

Overwhelming low ripple noise and high stability designed

RSS series

RSS series

output voltage
0 to 20 kV
output current
0 to 30 mA
output power
0 to 30 W
Compact, high stability and low noise

Both external VR and voltage for output control

TM series

TM series

output voltage
0 to 3kV
output current
0 to 2mA
output power
0 to 1.6W
Ultra Low Ripple PCB Mountable High Voltage Power Supply

Low ripple, high stability

TC series

TC series

output voltage
0 to 2kV
output current
0 to 1.5mA
output power
0 to 1.5W
Ultra-compact HV power supply for PMTs

Low ripple, Space-saving, and High reliability

TA series

TA series

output voltage
0 to 2 kV
output current
0 to 1.5 mA
output power
0 to 1.5 W
Ultra-compact HV power supply for PMTs

Low ripple, Space-saving, and High reliability

RA/RB series

RA/RB series

output voltage
0 to 40 kV
output current
0 to 200 mA
output power
0 to 60 W
High power & Low Noise HV Power Supplies

ideal for PMT, E-Beam, HV testing

REK/REKJ series

REK/REKJ series

output votage
0 to 1500V
output current
0 to 1200A
output power
0 to 15kW
Versatile, High-performance

Compact and High power, PFC circuit and universal input, Various operations is available

TB series

TB series

output voltage
0 to 1000V
output current
0 to 108A
output power
0 to 1080W
Wide range output/Turbo power supply

"Turbo function" installed, Compact size, Suppressing voltage/current overshoot

R4K-80 series

R4K-80 series

output voltage
0 to 320V
output current
0 to 10A
output power
0 to 80W
Ultra slim design and High power 80W

Various lineups for output current control at 0.1mA increment

R4K-36 series

R4K-36 series

output voltage
0 to 40V
output current
0 to 4A
output power
0 to 36W
Palmtop DC Power Supply

Excellent quietness with natural air-cooling system