1.With our original techrology of high speed response Matsusada E-chuck power supplies can apply voltage quickly. Chucking is just quick and smooth without time delay.
2.Matsusada E-chuck power supplies have functions not only to turn OFF high voltage,
but also to compulsorily reduce high voltage on the electrostatic chuck, wafer or glass substrate when releasing.
※Rapid and smooth chucking and releasing can remarkably contribute to reduction in tact time and process working time.
1.ECA and EJC use no relays for polarity inversion. For this reason, they are not affected by the contact life of relays, and can be used for long time without failure.
2.RF filter, which is optionally available, protects power supply from RF noise which can causes a failure or malfunction.
The design of Matsusada E-chuck power supplies have various functions such as 2 channel outputs for bi-polar E-chuck, HV output with desired waveform, polarity reversible, forced grounding or relay to separate E-chuck and power supply, and have all the functions required for E-chuck applications. Controls which fit users' required logic is possible.