Matsusada Precision Inc. is pleased to introduced newly developed high precision power supplies for Electrostatic Chuck application.

Matsusada Precision Inc. is pleased to introduced newly developed high precision power supplies for Electrostatic Chuck application, EC/ECA series, EJC series and MEC series. The concept of these series is the smooth chuck and de-chuck of wafer. The stable output, smooth change of polarity and discharge function will ensure the convenient and reliable operation for Electrostatic Chuck application.

More information about the EC series, EJC series EC/ECA series and MEC series can be found at the following:

EC series -->http://www.matsusada.com/high-voltage/ec/
ECA series -->http://www.matsusada.com/high-voltage/eca/
EJC series -->http://www.matsusada.com/high-voltage/ejc/
MEC series -->http://www.matsusada.com/high-voltage/mec/

Technical Information

• Fast response with electronically polarity change (EC/ECA and EJC series)
  
• Dual output (EC/ECA series)
  
• Polarity change by remote control as well as front panel operation
  
• Forced discharge function
  

About Matsusada

Matsusada Precision Inc., Japan's largest manufacturer of precision high voltage power supplies, has developed and manufactured a wide range of high voltage power supplies for general purpose and custom applications. Specializing in manufacturing power supplies for major medical equipment, semiconductor equipment and biochemical industries, where quality and reliability is of the utmost importance, Matsusada Precision will continue to push back the boundaries and widen the fields of application with our unique high voltage technologies.