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Matsusada Precision is a world leader high voltage power supply and hv electronics manufacturer.
Rack-mount high voltage power supplies
Lineup of rack-mount high voltage power supplies
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Rack-mount high voltage Power Supply Index |
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You will find the best solution with Matsusada's precision high voltage power supplies specially designed for various applications.
Should you need specifications not offered by our standard products, we are able to respond quickly and efficiently to your OEM requirements and thereby to reduce your development cycles.
| ECA series |
Output |
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Power
W |
Voltage
kV |
Specially designed for Electrostatic Chuck applications
2 output channels (1 kV to 5 kV model)
Bi-polar output
Built-in RF filter is available (option
Fast response with electronically polarity change (10 ms)
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5
6
30 |
1 to 10 |
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| EC series |
Output |
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Power
W |
Voltage
kV |
Specially designed for Electrostatic Chuck applications
2 output channels
Suitable for bi-polar system with just 1 unit
Reversible output
Smooth release of wafer with polarity reverse function
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200 |
1 to 10 |
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| AU series |
Output |
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Power
W |
Voltage
kV |
Wide output range from 1 kV to 120 kV and 30 W to 2.2kW
Low profile and lightweight
Local and remote operation
Front panel adjustable overload trip level
Remote and front panel monitoring of DC output voltage and current
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30
60
100
150
300
600
1200
2200 |
1 to 120 |

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| AF series |
Output |
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Power
W |
Voltage
kV |
Low ripple 10 ppm, High stability 50 ppm/Hr. (AE Series)
Wide line-up of high voltage power supply from 1 kV to 150 kV and 30 W to 300 W
Local and remote operation
Front panel adjustable overload trip level
Remote and front panel monitoring of DC output voltage and current
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10
30
60
75
100
120
125
175
180
240
250
300 |
1 to 150 |
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| ASX series |
Output |
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Power
W |
Voltage
V |
Ultra low ripple
Excellent stability
GP-IB interface (optional)
Compact 3 1/2 inch rack
Rotary encoded controls (with back-up memory)
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15 |
3100 |
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| AMS/AMT series |
Output |
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Voltage
kV |
Current
mA |
Response
kHz |
Output 600 V to ±10 kV
High speed response 360 V/µsec (AMT series)
All solid state
Various types of output wave forms according to the input wave
DC bias function
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0.6
1.0
1.5
3.0
5.0
10.0
20.0 |
100
60
40
20
20
10
10 |
100
60
40
30
20
10
5 |
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| AMP series |
Output |
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Voltage
kV |
Current
mA |
Response
kHz |
Output ±10 kV
High speed response 700 V/µsec
Peak current 30 mA max (within 10 mArms)
Various types of output wave forms according to the input wave
DC bias function
DC output voltage monitor (3 1/2 digital meter)
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10.0 |
10 |
7 |
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| COR series |
Output |
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Voltage
kV |
Current
mA |
Slew Rate
V/µs |
3 functions of CC, CV and HV amplifier in one unit
Four-quadrants output ±10kV, ±2mA
Fast response of slew rate 30V/µs
Return current terminal is standard and best for corona current control
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±10.0 |
±2 |
30 |
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| Xg series |
Output |
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Power
W |
Voltage
kV |
For X-ray tube (Both cathorde ground type and anode ground type are available)
Low ripple and high stability
Integrated filament supply (Floating AC for anode ground type)
Constant Voltage/Current operation with full protection for safety operation
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15
20
30
60
100
150
300
600
640
1000
1200 |
30 to 160 |
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| HEB/HIB series |
Output |
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| Voltage |
Current |
Ultra Low Ripple
High stability
Low temperature coefficient
Floating level : 4 ch PS programmable with Vmon and Imon for each PS
Ground level : 1 ch PS programmable with Vmon and Imon
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-10kV
-2kV
5V
5kV
7kV |
500µA
100µA
5A
500µA
500µA |
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| ECU series |
Output |
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Voltage
kV |
Current
mA |
Ripple
%p-p |
Designed for Electro Static Chuck (E-chuck) and ,2 outputs type
Output reversible and forced discharge function for smooth release.
RF filter integrated
Local,Remote or RS-232C control
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±0.5 ±1.0 ±1.5 |
10 3 2 |
0.2 |
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| AES/AESS series |
Output |
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Voltage
kV |
Current
mA |
Ripple
mVp-p |
Ultra Low Ripple and High stability
Low temperature coefficient, 25ppm/°c
(Below 10ppm/°c model is available)
With Voltage and current monitor
RS-232C control, RS-485, RS422, GPIB and USB
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5 5 10 10 15 15 30 30 |
3 6 1.5 3 1 2 0.5 1 |
10 10 20 20 30 30 50 50 |
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| PZE series |
Output |
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Voltage V |
Rated current
A |
Peak current
A |
High-power broadband piezo driver
Large capacity of piezo components can be driven at high speed
Piezo of 1µF can be driven at 12kHz
With DC bias function
Output over current protection protects load
Closed loop control is possible by use of your displacement sensor.
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100 150 300 |
1.3 0.9 0.45 |
3.75 2.5 1.25 |
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If you would like assistance in selecting a HVPS model for your application, or if, as an OEM, you wish a custom design solution, please do not hesitate to contact Matsusada:
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