Rack-mount high voltage power supplies

Rack-mount high voltage Power Supply Index

ECA series	Output
	Power W	Voltage kV
Specially designed for Electrostatic Chuck applications 2 output channels (1 kV to 5 kV model) Bi-polar output Built-in RF filter is available (option Fast response with electronically polarity change (10 ms)	5 6 30	1 to 10
EC series	Output
	Power W	Voltage kV
Specially designed for Electrostatic Chuck applications 2 output channels Suitable for bi-polar system with just 1 unit Reversible output Smooth release of wafer with polarity reverse function	200	1 to 10
AU series	Output
	Power W	Voltage kV
Wide output range from 1 kV to 120 kV and 30 W to 2.2kW Low profile and lightweight Local and remote operation Front panel adjustable overload trip level Remote and front panel monitoring of DC output voltage and current	30 60 100 150 300 600 1200 2200	1 to 120
AF series	Output
	Power W	Voltage kV
Low ripple 10 ppm, High stability 50 ppm/Hr. (AE Series) Wide line-up of high voltage power supply from 1 kV to 150 kV and 30 W to 300 W Local and remote operation Front panel adjustable overload trip level Remote and front panel monitoring of DC output voltage and current	10 30 60 75 100 120 125 175 180 240 250 300	1 to 150
ASX series	Output
	Power W	Voltage V
Ultra low ripple Excellent stability GP-IB interface (optional) Compact 3 1/2 inch rack Rotary encoded controls (with back-up memory)	15	3100

AMS/AMT series	Output
	Voltage kV	Current mA	Response kHz
Output 600 V to ±10 kV High speed response 360 V/µsec (AMT series) All solid state Various types of output wave forms according to the input wave DC bias function	0.6 1.0 1.5 3.0 5.0 10.0 20.0	100 60 40 20 20 10 10	100 60 40 30 20 10 5
AMP series	Output
	Voltage kV	Current mA	Response kHz
Output ±10 kV High speed response 700 V/µsec Peak current 30 mA max (within 10 mArms) Various types of output wave forms according to the input wave DC bias function DC output voltage monitor (3 1/2 digital meter)	10.0	10	7
COR series	Output
	Voltage kV	Current mA	Slew Rate V/µs
3 functions of CC, CV and HV amplifier in one unit Four-quadrants output ±10kV, ±2mA Fast response of slew rate 30V/µs Return current terminal is standard and best for corona current control	±10.0	±2	30

Xg series	Output
	Power W	Voltage kV
For X-ray tube (Both cathorde ground type and anode ground type are available) Low ripple and high stability Integrated filament supply (Floating AC for anode ground type) Constant Voltage/Current operation with full protection for safety operation	15 20 30 60 100 150 300 600 640 1000 1200	30 to 160

HEB/HIB series	Output
	Voltage	Current
Ultra Low Ripple High stability Low temperature coefficient Floating level : 4 ch PS programmable with Vmon and Imon for each PS Ground level : 1 ch PS programmable with Vmon and Imon	-10kV -2kV 5V 5kV 7kV	500µA 100µA 5A 500µA 500µA

ECU series	Output
	Voltage kV	Current mA	Ripple %p-p
Designed for Electro Static Chuck (E-chuck) and ,2 outputs type Output reversible and forced discharge function for smooth release. RF filter integrated Local,Remote or RS-232C control	±0.5 ±1.0 ±1.5	10 3 2	0.2
AES/AESS series	Output
	Voltage kV	Current mA	Ripple mVp-p
Ultra Low Ripple and High stability Low temperature coefficient, 25ppm/°c (Below 10ppm/°c model is available) With Voltage and current monitor RS-232C control, RS-485, RS422, GPIB and USB	5 5 10 10 15 15 30 30	3 6 1.5 3 1 2 0.5 1	10 10 20 20 30 30 50 50

PZE series	Output
	Voltage V	Rated current A	Peak current A
High-power broadband piezo driver Large capacity of piezo components can be driven at high speed Piezo of 1µF can be driven at 12kHz With DC bias function Output over current protection protects load Closed loop control is possible by use of your displacement sensor.	100 150 300	1.3 0.9 0.45	3.75 2.5 1.25

If you would like assistance in selecting a HVPS model for your application, or if, as an OEM, you wish a custom design solution, please do not hesitate to contact Matsusada: