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Electrostatic chuck power supplies - Reversible output moduleMEC series is a high voltage power supply developed especially for electrostatic chuck applications. Compact module type for OEM application. Smooth wafer release is possible with polarity change by remote control. |
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Smooth WAFER transmission with polarity reverse function |
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 MEC series is a reversible high voltage power supply developed especially for electrostatic chuck applications. The quick reversible feature and source and sink current feature secure the smooth release of wafer.Main features
Possible applications
 Data sheet in pdf format contains full specifications, including possible options and models dimensions. It is backwards compatible from Acrobat Reader 3. If you don't have the Acrobat Reader™ freeware, you can download it from Adobe's web site.Alternatively you can browse other power supplies for any application, or look for other Modular/Module models: |
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HVPS Selection Guide
Contact
For ATE requirement
Hot HV Applications
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