Electrostatic chuck power supplies - Reversible output module
MEC series is a high voltage power supply developed especially for electrostatic chuck applications. Compact module type for OEM application. Smooth wafer release is possible with polarity change by remote control.
MEC series is a reversible high voltage power supply developed especially for electrostatic chuck applications. The quick reversible feature and source and sink current feature secure the smooth release of wafer.
Main features
Possible applications
- Specially designed for Electrostatic Chuck applications
- Smooth release of wafer with polarity reverse function
- Polarity change and output voltage control with remote signal
- Output Voltage and Current monitor
Possible applications
- Electrostatic Chuck (E-Chuck)
| Output | |
|---|---|
| Power [W] | Voltage [kV] |
| 10 | 1 to 10 |
