Lithography requires quite stable HV outputs for fine lithograph, and Matsusada's various HV power supply modules with low ripple noise and high stability are just ideal for that application. Spike noise and ripple noise affect the Lithography that is critical for lithography application. Chose quite stable and low noise HV power supplies for your equipment. Please ask for better noise, stability or temperature coefficient for your applications.

Various high voltage power supplies with high reliability and compact sizes are offered for ion injection. Furthermore, the GP series adopts optical fiber communication and highly reliable communication is expected. It supports all models including low voltage RE, RF, RG and RK and allows reduction of the time to develop different software for each model to be used in control or measurement. This leads to great reduction of device development time.