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| Precision high voltage power supplies for Lithography applicationsLithography requires quite stable HV outputs for fine lithograph, and Matsusada's various HV power supply modules with low ripple noise and high stability are just ideal for that application. Spike noise and ripple noise affect the Lithography that is critical for lithography application. Chose quite stable and low noise HV power supplies for your equipment. Please ask for better noise, stability or temperature coefficient for your applications.
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| Highly stable HV power supply series designed for the Lithography |
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Various high voltage power supplies with high reliability and compact sizes are offered for ion injection. Furthermore, the GP series adopts optical fiber communication and highly reliable communication is expected. It supports all models including low voltage RE, RF, RG and RK and allows reduction of the time to develop different software for each model to be used in control or measurement. This leads to great reduction of device development time.
K3-R - Ultra low ripple 0.001% p-p
High stability 0.001%/5 min
Reverse polarity control
Constant Voltage control
Output Voltage monitor
K7 - Exceptional low ripple and high stability
Remote and local programming
Fully protected against continuous short circuit
Optional output connector
AU - Wide output range from 1 kV to 120 kV and 30 W to 1.2 kW
Low profile and lightweight
Local and remote operation
Front panel adjustable overload trip level
Remote and front panel monitoring of DC output voltage and current
Automatic protection against overload, short circuit and arc.
Greater than 85% efficiency
GPIB interface is available and programmable with optional GPIB units
CE Certified for 30 to 300 W of 1 to 60 kV products
AF - Low ripple 1 ppm, High stability 50 ppm/Hr. (AE Series)
Wide line-up of high voltage power supply from 1 kV to 150 kV and 30 W to 300 W
Local and remote operation
Front panel adjustable overload trip level
Remote and front panel monitoring of DC output voltage and current
Automatic protection against overload, short circuit and arc.
GPIB interface option
AMS/AMT - Output 600 V to ±10 kV
High-speed response 360 V/µsec (AMT series)
All solid state
Various types of output wave forms according to the input wave
DC bias function
DC output voltage monitor (3 1/2 digital meter)
AMP - Output ±10 kV
High speed response 700 V/µsec
Peak current 30 mA max (within 10 mArms)
Various types of output wave forms according to the input wave
DC bias function
DC output voltage monitor (3 1/2 digital meter)
HEB/HIB - Ultra Low Ripple
High stability
Low temperature coefficient.
Floating level: 4 ch PS programmable with Vmon and Imon for each PS.
Ground level: 1 ch PS programmable with Vmon and Imon.
Custom configuration with additional output is available.
Various models up to 100 kV are available.
Catalog Request | Call / fax If you would like assistance in selecting a model for your lithography application, or if, as an OEM, you wish a custom design solution, please do not hesitate to contact Matsusada: |
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