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| For Ion Implanting high voltage and high powerHV Power Supplies designed for Ion Implanting application with diverse output range from 30 W to 6.4 kW are available, which will meet the low, middle and high power requirements for Ion Implantation. Highly stable and quite low noise output secure the high performance of Ion Implanting, and HV amplifiers or system supply with integrated floating output are also available.
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| Compact HV power supply allows easy put into the rack with high density. High reliable ATE program development is simple and easy |
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Various high voltage power supplies with high reliability and compact sizes are offered for ion injection. Furthermore, the GP series adopts optical fiber communication and highly reliable communication is expected. It supports all models including low voltage RE, RF, RG and RK and allows reduction of the time to develop different software for each model to be used in control or measurement. This leads to great reduction of device development time.
RA/RB - Low Cost, High Reliability
Fully Encapsulated
External Voltage and Potentiometer Programmable
Protected against arc & short circuit
Output Voltage and current monitor
S - Well Regulated, Low Ripple
High Reliability
Fully Encapsulated
External Voltage and Potentiometer Programmable
Protected against arc & short circuit
AU - Wide output range from 1 kV to 120 kV and 30 W to 1.2 kW
Low profile and lightweight
Local and remote operation
Front panel adjustable overload trip level
Remote and front panel monitoring of DC output voltage and current
Automatic protection against overload, short circuit and arc.
Greater than 85% efficiency
GPIB interface is available and programmable with optional GPIB units
CE Certified for 30 to 300 W of 1 to 60 kV products
AMS/AMT - Output 600 V to ±10 kV
High-speed response 360 V/µsec (AMT series)
All solid state
Various types of output wave forms according to the input wave
DC bias function
DC output voltage monitor (3 1/2 digital meter)
AMP - Output ±10 kV
High speed response 700 V/µsec
Peak current 30 mA max (within 10 mArms)
Various types of output wave forms according to the input wave
DC bias function
DC output voltage monitor (3 1/2 digital meter)
W - Small design
Remote programming and monitoring
Constant Voltage/Constant Current
High Efficiency
Short circuit and Arc protected
HEB/HIB - Ultra Low Ripple
High stability
Low temperature coefficient.
Floating level: 4 ch PS programmable with Vmon and Imon for each PS.
Ground level: 1 ch PS programmable with Vmon and Imon.
Custom configuration with additional output is available.
Various models up to 100 kV are available.
Catalog Request | Call / fax If you would like assistance in selecting a model for your ion implanting application, or if, as an OEM, you wish a custom design solution, please do not hesitate to contact Matsusada: |
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