Electrostatic chuck power supplies - Dual output fast response rack mount

Reliable retention and smooth put off wafers

TE

NRTL (UL1950), TUV, CE certified
4 W high power PCB mountable
Low ripple, high stability, and well-regulated output
Low Noise with 6-sided shielding
External potentiometer or external control voltage programming
Continuous short circuit protection

TK

4 W high power PCB mountable
Low ripple, high stability, and well-regulated output
Low Noise with 6-sided shielding
External potentiometer or external control voltage programming
Continuous short circuit protection

TH

Ultra-compact, PCB mountable
Low ripple, 7 mVp-p (1 kV output type)
Low Noise with metal shielded case
Well-regulated, high performance
Arc and continuous short circuit protection
High power 5 W for PMT array

MEC

Specially designed for Electrostatic Chuck applications
Smooth release of wafer with polarity reverse function
Polarity change and output voltage control with remote signal
Output Voltage and Current monitor

EJC

Specially designed for Electrostatic Chuck applications
Fast response (10 ms) with electronically polarity change
Bi-polar output
Integrated RF filter (optional)
Long life and high reliability with no relay

ECA

Specially designed for Electrostatic Chuck applications.
2 output channels (1 kV to 5 kV model).
Bi-polar output.
Built-in RF filter is available (option).
Fast response with electronically polarity change (10 ms).
Uses no relay, so high reliability and long life.

EC

Specially designed for Electrostatic Chuck applications.
2 output channels.
Suitable for bi-polar system with just 1 unit.
Reversible output.
Smooth release of wafer with polarity reverse function.
Compact and high power.

UR

Small Size PCB Mountable
High Performance, low Ripple 0.5% TYP
Input/Output Proportional
Input/Output Isolation

URG

Small Size PCB Mountable
High Performance, low Ripple 0.5% TYP
Input/Output Proportional
Input/Output Isolation

URS

Small Size PCB Mountable
High Performance, low Ripple 0.5% TYP
Input/Output Proportional
Input/Output Isolation

AP/AS

Output ±300 V to ±3 kV
High-speed response
All solid state
Various types of output wave forms according to the input wave
Small Design

AMS/AMT

Output 600 V to ±10 kV
High-speed response 360 V/µsec (AMT series)
All solid state
Various types of output wave forms according to the input wave
DC bias function
DC output voltage monitor (3 1/2 digital meter)

AMP

Output ±10 kV
High speed response 700 V/µsec
Peak current 30 mA max (within 10 mArms)
Various types of output wave forms according to the input wave
DC bias function
DC output voltage monitor (3 1/2 digital meter)

Catalog Request  |  Call / fax

If you would like assistance in selecting a model for your electrostatic chuck (e-chuck) application, or if, as an OEM, you wish a custom design solution, please do not hesitate to contact Matsusada: