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Home > Product List > HV power supplies > Electron beam

Precision high voltage power supplies for electron beam (E-Beam) applications

Looking for high stability high voltage output for your electron beam application? Matsusada's numerous precision high voltage power supplies for electron beam all provide ultra low ripple and highly stable output for the most precise electron beams that high precision drawing or high resolution imaging require.
The broad e-beam power supply product line includes individual compact modules and multi-channel HV systems with several floating outputs. High speed high voltage amplifiers are also available for your requirements. You will find the best solution with Matsusada's precision high voltage power supplies for Electron Beam.
Should you need specifications not offered by our standard electron beam power supplies, we are able to respond quickly and efficiently to your OEM requirements and thereby to reduce your development cycles.

High stability HV power supplies designed for the E-Beam precision you require

The most precise electron beams are obtained with quite stable and low ripple noise high voltage output, especially for such applications as etching or scanning microscope.
The quite stable high voltage output contributes to the accurate focusing of the micro focus X-ray tube or electrostatic lens. High precision drawing and high resolution imaging can be easily obtained.
Our electron beam power supplies are also good to control the electron or ion beam in vacuumed chamber, or for ion source, doping, metal vaporization, mass spectrometry or physics and chemistry testing.
According to your needs, you can choose from rack-mount e-beam power supplies or power supply modules (sorted by power and voltage).

If you are also looking for ultra compact high power low voltage DC power supplies offering the necessary stability and scalability for your electron beam accelerator application, please check our electron beam accelerator DC power supply lineup.


model name output features
voltage[kv] current[ma]
HEB/HIB series
HEB/HIB series
-10kV
-10kV
-5kV
5V
200µA
250µA
50µA
5A
  • Ultra Low Ripple
  • High stability
  • Low temperature coefficient
  • Floating level : 4 ch PS programmable with Vmon and Imon for each PS
  • Ground level : 1 ch PS programmable with Vmon and Imon
AF/AE series
AF/AE series
1 to 150kV 10 to 300W
  • Low ripple 10 ppm, High stability 50 ppm/Hr. (AE Series)
  • Wide line-up of high voltage power supply from 1 kV to 150 kV and 30 W to 300 W
  • Local and remote operation
  • Front panel adjustable overload trip level
  • Remote and front panel monitoring of DC output voltage and current
AU series
AU series
1 to 120kV 30 to 2200W
  • Wide output range from 1 kV to 120 kV and 30 W to 1.2 kW
  • Low profile and lightweight
  • Local and remote operation
  • Front panel adjustable overload trip level
  • Remote and front panel monitoring of DC output voltage and current
AMS/AMT series
AMS/AMT series
±0.6kV to ±20kV 30 to 60W
  • Output 600 V to ±10 kV
  • High speed response 360 V/µsec (AMT series)
  • All solid state
  • Various types of output wave forms according to the input wave
  • DC bias function
AMP series
AMP series
±0.4 to ±20kV 100 to 1200W
  • Output ±10 kV
  • High speed response 700 V/µsec
  • Peak current 30 mA max (within 10 mArms)
  • Various types of output wave forms according to the input wave
  • DC bias function
  • DC output voltage monitor (3 1/2 digital meter)
K3-R series
K3-R
1 to 30kV 3 to 7W
  • Ultra low ripple 0.001% p-p
  • High stability 0.001%/5 min
  • Reverse polarity control
  • Constant Voltage control
  • Output Voltage monitor
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