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Home > Product List > HV power supplies > HV power supplies,List > EJC series

Electrostatic chuck power supplies - Fast response bench top

EJC series is a high voltage power supply developed especially for electrostatic chuck applications. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity.


EJC series
Smooth WAFER transmission with polarity reverse function
EJC series is a high voltage power supply developed especially for electrostatic chuck applications. Smooth wafer transmission is possible with EJC's bipolar output and remote/local ON/OFF function. Forced discharge function and stable HV output also enhance the high operability of E-chuck.

Feature&Outline

Main features
  • Specially designed for Electrostatic Chuck applications
  • Fast response (10 ms) with electronically polarity change
  • Bi-polar output
  • Integrated RF filter (optional)
  • Long life and high reliability with no relay

Possible applications
  • Electrostatic Chuck (E-Chuck)

Specification

Output
Power [W] Voltage [kV]
6 1 to 5
3

DataSheet(PDF)


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