Electrostatic chuck power supplies - Fast response bench top
EJC series is a high voltage power supply developed especially for electrostatic chuck applications. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity.
EJC series is a high voltage power supply developed especially for electrostatic chuck applications. Smooth wafer transmission is possible with EJC's bipolar output and remote/local ON/OFF function. Forced discharge function and stable HV output also enhance the high operability of E-chuck.
Main features
Possible applications
- Specially designed for Electrostatic Chuck applications
- Fast response (10 ms) with electronically polarity change
- Bi-polar output
- Integrated RF filter (optional)
- Long life and high reliability with no relay
Possible applications
- Electrostatic Chuck (E-Chuck)
| Output | |
|---|---|
| Power [W] | Voltage [kV] |
| 6 | 1 to 5 |
| 3 | |
