Electrostatic chuck power supplies - Fast response bench top

Smooth WAFER transmission with polarity reverse function

Main features

• Specially designed for Electrostatic Chuck applications
• Fast response (10 ms) with electronically polarity change
• Bi-polar output
• Integrated RF filter (optional)
• Long life and high reliability with no relay
   

Possible applications

Electrostatic Chuck (E-Chuck)
 

Data sheet in pdf format contains full specifications, including possible options and models dimensions. It is backwards compatible from Acrobat Reader 3. If you don't have the Acrobat Reader™ freeware, you can download it from Adobe's web site.

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