Compact HV supply for E-chuck application

ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.



Best fit for OEM application with its ultra compact design



 


ECU SeriesDesigned in quite compact chassis for OEM application, and has various useful functions for E-chuck applications including forced discharge, two channel output with one control voltage, digital remote control, etc.

 

Features

  • Designed for Electro Static Chuck (E-chuck) and ,2 outputs type
  • Output reversible and forced discharge function for smooth release.
  • RF filter integrated
  • Local,Remote or RS-232C control

 

Applications

ECU Series
Electrostatic chuck 

 

 

 

 

 


get Acrobat ReaderData sheet in pdf format contains full specifications, including possible options and models dimensions. It is backwards compatible from Acrobat Reader 3. If you don't have the Acrobat Reader™ freeware, you can download it from Adobe's web site.

Alternatively you can browse other power supplies for any application, or look for other Modular/Module models:

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