Compact HV supply for E-chuck application
ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.
Designed in quite compact chassis for OEM application, and has various useful functions for E-chuck applications including forced discharge, two channel output with one control voltage, digital remote control, etc.
Main features
Possible applications
- Designed for Electro Static Chuck (E-chuck) and ,2 outputs type
- Output reversible and forced discharge function for smooth release.
- RF filter integrated
- Local,Remote or RS-232C control
Possible applications
- Electrostatic chuck
| Output | ||
|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [%p-p] |
| ±0.5 | 10 | 0.2 |
| ±1.0 | 3 | |
| ±1.5 | 2 | |
