Electrostatic chuck power supplies - Dual output fast response rack mount

Smooth WAFER transmission with polarity reverse function

Main features

• Specially designed for Electrostatic Chuck applications.
• 2 output channels (1 kV to 5 kV model).
• Bi-polar output.
• Built-in RF filter is available (option).
• Fast response with electronically polarity change (10 ms).
• Uses no relay, so high reliability and long life.
   

Possible applications

Electrostatic Chuck (E-Chuck)
 

Data sheet in pdf format contains full specifications, including possible options and models dimensions. It is backwards compatible from Acrobat Reader 3. If you don't have the Acrobat Reader™ freeware, you can download it from Adobe's web site.

Alternatively you can browse other power supplies for any application, or look for other Rack-mount models:

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