Electrostatic chuck power supplies - Dual output fast response rack mount
ECA is a high voltage power supply developed especially for electrostatic chuck applications. The Wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity. Dual output channel.
ECA series is a high voltage power supply developed especially for electrostatic chuck applications. Smooth wafer transmission is possible with ECA's bipolar output and remote/local ON/OFF function. Forced discharge function and stable HV output also enhance the high operability of E-chuck.
Main features
Possible applications
- Specially designed for Electrostatic Chuck applications.
- 2 output channels (1 kV to 5 kV model).
- Bi-polar output.
- Built-in RF filter is available (option).
- Fast response with electronically polarity change (10 ms).
- Uses no relay, so high reliability and long life.
Possible applications
- Electrostatic Chuck (E-Chuck)
| Output | |
|---|---|
| Power[W] | Voltage[kV] |
| 3 | 1 to 10 |
| 6 | |
| 30 | |
