Electrostatic chuck power supplies - Dual output rack mount
EC series is a high voltage power supply developed especially for electrostatic chuck applications. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity.
EC series is a high voltage power supply developed especially for electrostatic chuck applications. Smooth wafer transmission is possible with ECA's reversible output and remote/local ON/OFF function. Forced discharge function and stable HV output also enhance the high operability of E-chuck.
Main features
Possible applications
- Specially designed for Electrostatic Chuck applications.
- 2 output channels.
- Suitable for bi-polar system with just 1 unit.
- Reversible output.
- Smooth release of wafer with polarity reverse function.
- Compact and high power.
Possible applications
- Electrostatic Chuck (E-Chuck)
| Output | |
|---|---|
| Power[W] | Voltage[kV] |
| 10 | 1 to 10 |
