SEM/Semiconductor inspection system power supply
AES/AESS series are designed for applications require highly stable output. The ripple noise is as small as 10mV(5kV model), and the stability is also minimum(10ppm/Hr AESS series). Digital interface is equipped for more convenient operation.
AES/AESS series are high voltage power supplies with quite stable output for various high voltage applications, which require precise outputs. The low ripple and temperature coefficient secure you the quite stable output voltage. 4-digits digital meter and digital interface will secure more precise monitoring and setting.
Main features
Possible applications
- Ultra Low Ripple and High stability
- Low temperature coefficient, 25ppm/°c＜AESS＞
(Below 10ppm/°c model is available) - With Voltage and current monitor
- RS-232C control, RS-485, RS422, GPIB and USB
Possible applications
- SEM (Scanning Electron Microscope)
- CV SEM
- E-Beam etching
- FIB(Focused Ion Beam)
- Auger Electron Spectrometer
| Output | ||
|---|---|---|
| Voltage[kV] | Current[mA] | Ripple [mVp-p] |
| 5 | 3 | 10 |
| 5 | 6 | 10 |
| 10 | 1.5 | 20 |
| 10 | 3 | 20 |
| 15 | 1 | 30 |
| 15 | 2 | 30 |
| 30 | 0.5 | 50 |
| 30 | 1 | 50 |
